Patent Assignment
Reel/Frame 018684/0677
Assignment of Assignor's Interest
Recorded: 2006-12-21
Pages: 2
Assignor
TANAKA, TOSHIHIKO
Executed: 2006-12-11
Assignee
OLYMPUS CORPORATION
43-2, HATAGAYA 2-CHOME, SHIBUYA-KU, TOKYO, JAPAN
Covered Property
(1)
Defect Inspection Device and Substrate Manufacturing System Using the Same