Patent Assignment
Reel/Frame 018687/0769
Assignment of Assignor's Interest
Recorded: 2006-12-28
Pages: 4
Assignors
KAMIKUBO, TAKASHI
Executed: 2006-12-14
TAMAMUSHI, SHUICHI
Executed: 2006-12-14
SUNAOSHI, HITOSHI
Executed: 2006-12-14
OHTOSHI, KENJI
Executed: 2006-12-14
NISHIMURA, RIEKO
Executed: 2006-12-14
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Method of Calculating Deflection Aberration Correcting Voltage and Charged Particle Beam Writing Method