IP Library Assignment 018691/0653
Patent Assignment
Reel/Frame 018691/0653

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2006-12-06 Received: 2006-12-13 Pages: 3
Assignors
DIVERGILIO, WILLIAM F.
Executed: 2006-11-30
SRIVASTAVA, ASEEM F.
Executed: 2006-11-30
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES
Covered Applications (2)
LATERAL OXIRANE COMPOUND AND POLYMER THEREOF
App. No. 11/635,652
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES
App. No. 11/635,227