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App. No. 11/635,227 · Confirmation No. 6020

WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2013-02-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
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2013-02-08 PA.. Power of Attorney 1 View
2013-02-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-17 ISSUE.NTF Issue Notification 1 View
2010-10-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2010-10-28 LET. Miscellaneous Incoming Letter 1 View
2010-10-28 WFEE Fee Worksheet (SB06) 2 View
2010-10-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-08-24 M327 Miscellaneous Communication to Applicant - No Action Count 2 View
2010-08-24 1449 List of References cited by applicant and considered by examiner 2 View
2010-08-11 TRAN.LET Transmittal Letter 1 View
2010-08-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-08-11 DRW Drawings-only black and white line drawings 2 View
2010-08-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2010-08-11 TRAN.LET Transmittal Letter 2 View
2010-08-11 WFEE Fee Worksheet (SB06) 2 View
2010-08-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-08-06 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2010-08-06 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2010-08-06 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2010-08-06 SRNT Examiner's search strategy and results 5 View
2010-08-06 SRFW Search information including classification, databases and other search related notes 1 View
2010-08-06 OA.APPENDIX Office Action Appendix 1 View
2010-08-06 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2010-08-06 SRNT Examiner's search strategy and results 5 View
2010-08-06 BIB Bibliographic Data Sheet 1 View
2010-06-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-06-23 CLM Claims 5 View
2010-06-23 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2010-06-23 DRW Drawings-only black and white line drawings 5 View
2010-06-23 XT/ Extension of Time 1 View
2010-06-23 WFEE Fee Worksheet (SB06) 2 View
2010-06-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-06-23 WFEE Fee Worksheet (SB06) 1 View
2010-02-23 CTNF Non-Final Rejection 14 View
2010-02-23 892 List of references cited by examiner 1 View
2010-02-23 FWCLM Index of Claims 1 View
2010-02-23 SRFW Search information including classification, databases and other search related notes 1 View
2010-02-23 BIB Bibliographic Data Sheet 1 View
2010-02-23 SRNT Examiner's search strategy and results 5 View
2010-02-23 1449 List of References cited by applicant and considered by examiner 4 View
2010-02-23 1449 List of References cited by applicant and considered by examiner 4 View
2009-10-13 ELC. Response to Election / Restriction Filed 1 View
2009-10-13 CLM Claims 5 View
2009-10-13 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2009-10-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-10-13 WFEE Fee Worksheet (SB06) 1 View
2009-09-28 CTRS Requirement for Restriction/Election 6 View
2009-09-28 FWCLM Index of Claims 1 View
2008-06-12 NTC.PUB Notice of Publication 1 View
2007-02-08 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2007-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-01-23 APP.FILE.REC Filing Receipt 3 View
2006-12-06 TRNA Transmittal of New Application 5 View
2006-12-06 SPEC Specification 13 View
2006-12-06 CLM Claims 5 View
2006-12-06 ABST Abstract 1 View
2006-12-06 DRW Drawings-only black and white line drawings 5 View
2006-12-06 OATH Oath or Declaration filed 2 View
2006-12-06 WFEE Fee Worksheet (SB06) 1 View
2006-12-06 WFEE Fee Worksheet (SB06) 1 View
2006-12-06 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
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Quick Facts
App. No.
11/635,227
Filed
2006-12-06
Granted
2010-12-07
Pub. No.
US20080138992A1
Art Unit
1716
PTA
-45 days