CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECTLY TYPED ASSIGNOR'S MIDDLE INITIAL TO REFLECT ASEEM K. SRIVASTAVA PREVIOUSLY RECORDED ON REEL 018691 FRAME 0653. ASSIGNOR(S) HEREBY CONFIRMS THE THE INCORRECTLY TYPED MIDDLE INITIAL OF THE ASSIGNOR SHOULD READ AS ASEEM K. SRIVASTAVA.

Recorded: 2009-09-30 Received: 2009-09-30 Pages: 5

Assignors

DIVERGILIO, WILLIAM F.

Executed: 2006-11-30

SRIVASTAVA, ASEEM K.

Executed: 2006-11-30

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES

Covered Application (1)