Patent Assignment
Reel/Frame 018699/0904
Assignment of Assignor's Interest
Recorded: 2007-01-03
Pages: 3
Assignors
OZAKI, TAKASHI
Executed: 2006-12-25
YUASA, KAZUHIRO
Executed: 2006-12-25
MAEDA, KIYOHIKO
Executed: 2006-12-25
Assignee
HITACHI KOKUSAI ELECTRIC INC.
4-14-1, SOTO-KANDA, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Producing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.