Patent Assignment
Reel/Frame 018723/0823
Assignment of Assignor's Interest
Recorded: 2006-12-19
Pages: 3
Assignors
SHIH, HONG
Executed: 2006-12-14
YIN, YAOBO
Executed: 2006-12-18
AUGUSTINO, JASON
Executed: 2006-12-14
ZHOU, CATHERINE
Executed: 2006-12-14
AVOYAN, ARMEN
Executed: 2006-12-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Wet Cleaning Electrode Assemblies for Plasma Processing Apparatuses