Patent Assignment
Reel/Frame 018726/0243
Assignment of Assignor's Interest
Recorded: 2006-12-18
Pages: 4
Assignors
REDEKER, FRITZ
Executed: 2006-12-14
BOYD, JOHN
Executed: 2006-12-14
DORDI, YEZDI
Executed: 2006-12-14
YOON, HYUNGSUK ALEXANDER
Executed: 2006-12-14
LI, SHIJIAN
Executed: 2006-12-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Systems for Low Interfacial Oxide Contact Between Barrier and Copper Metallization