Patent Assignment
Reel/Frame 018734/0310
Assignment of Assignor's Interest
Recorded: 2006-12-27
Pages: 3
Assignor
YAMAMOTO, HAJIME
Executed: 2006-12-26
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Reticle Transport Apparatus, Exposure Apparatus, Reticle Transport Method, and Reticle Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.