Patent Assignment
Reel/Frame 018737/0191
Assignment of Assignor's Interest
Recorded: 2007-01-10
Pages: 3
Assignor
BRCKA, JOZEF
Executed: 2006-11-29
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Etch System with Integrated Inductive Coupling