Patent Assignment
Reel/Frame 018739/0660
Assignment of Assignor's Interest
Recorded: 2006-12-19
Pages: 2
Assignor
SHIBUTA, MAKOTO
Executed: 2006-09-01
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method