Patent Assignment
Reel/Frame 018750/0103
Assignment of Assignor's Interest
Recorded: 2006-12-29
Pages: 2
Assignor
KOMATSUDA, HIDEKI
Executed: 2006-12-26
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Optical Integrator, Illumination Optical Device, Exposure Device, and Exposure Method