Patent Assignment
Reel/Frame 018763/0881
Assignment of Assignor's Interest
Recorded: 2007-01-12
Pages: 4
Assignor
TANAKA, KEIICHI
Executed: 2006-12-25
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Stage Unit and Exposure Apparatus