Patent Assignment
Reel/Frame 018772/0426
Assignment of Assignor's Interest
Recorded: 2007-01-18
Pages: 4
Assignors
AOKI, SHIGEKI
Executed: 2006-12-15
SAKAI, YUICHI
Executed: 2006-12-14
YAMASHITA, MITSUO
Executed: 2006-12-14
SHINYA, HIROSHI
Executed: 2006-12-15
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Heat Processing Apparatus and Heat Processing Method