Patent Assignment
Reel/Frame 018773/0946
Assignment of Assignor's Interest
Recorded: 2007-01-09
Pages: 2
Assignors
NAGATOMO, WATARU
Executed: 2006-10-17
MOROKUMA, HIDETOSHI
Executed: 2006-10-26
MIYAMOTO, ATSUSHI
Executed: 2006-10-17
SASAZAWA, HIDEAKI
Executed: 2006-10-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Semiconductor Device Production Process Monitoring and Method and Apparatus for Estimating Cross Sectional Shape of a Pattern
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.