Patent Assignment
Reel/Frame 018791/0527
Assignment of Assignor's Interest
Recorded: 2007-01-23
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate Defect Inspection Method, Computer Readable Storage Medium, and Defect Inspection Apparatus