Assignment of Assignor's Interest

Recorded: 2007-01-24 Pages: 4

Assignor

AKRION, INC.

Executed: 2007-01-20

Assignee

AKRION TECHNOLOGIES, INC.

1105 N. MARKET ST. - SUITE 1300, WILMINGTON, DELAWARE, 19899

Covered Property (1)

Backside cleaning of substrates

Application: 60/837,965 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.