IP Library › Patent Application 60837965
Patent Application Provisional Small
App. No. 60/837,965 · Confirmation No. 4242

Backside cleaning of substrates

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-08-16 TRNA Transmittal of New Application 2 View
2006-08-16 SPEC Specification 13 View
2006-08-16 CLM Claims 6 View
2006-08-16 ABST Abstract 1 View
2006-08-16 DRW Drawings-only black and white line drawings 14 View
2006-08-16 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/837,965
Filed
2006-08-16