Patent Assignment
Reel/Frame 018812/0642
Assignment of Assignor's Interest
Recorded: 2007-01-17
Pages: 3
Assignor
HORIGUCHI, TAKAHIRO
Executed: 2006-11-30
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method