Patent Assignment
Reel/Frame 018832/0186
Assignment of Assignor's Interest
Recorded: 2007-01-31
Pages: 4
Assignors
SAULE, WERNER
Executed: 2007-01-18
BERGER, LOTHAR
Executed: 2007-01-18
KRAUS, CHRISTIAN
Executed: 2007-01-18
WEIHING, ROBERT
Executed: 2007-01-18
Assignee
STEAG HAMATECH AG
FERDINAND-VON-STEINBEIS-RING 10, STERNENFELS, D-75447, GERMANY
Covered Property
(1)
Method and Device for the Thermal Treatment of Substrates
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Change of Name
Mar 18, 2011
From: STEAG HAMATECH AG
To: HAMATECH AG
Reel/Frame 025983/0676 →
Merger
May 11, 2011
From: HAMATECH AG
To: SINGULUS TECHNOLOGIES AG
Reel/Frame 026263/0464 →
Assignment of Assignor's Interest
May 18, 2011
From: SINGULUS TECHNOLOGIES AG
To: HAMATECH APE & CO. KG
Reel/Frame 026302/0913 →
Change of Name
Aug 16, 2012
From: HAMATECH APE GMBH & CO. KG
To: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG.
Reel/Frame 028801/0484 →