Patent Assignment
Reel/Frame 026263/0464
Merger
Recorded: 2011-05-11
Pages: 6
Assignor
HAMATECH AG
Executed: 2007-11-07
Assignee
SINGULUS TECHNOLOGIES AG
HANAUER LANDSTR. 103, KAHL AM MAIN, D-63796, GERMANY
Covered Property
(1)
Method and Device for the Thermal Treatment of Substrates
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 31, 2007
From: SAULE, WERNER; BERGER, LOTHAR; KRAUS, CHRISTIAN; WEIHING, ROBERT
To: STEAG HAMATECH AG
Reel/Frame 018832/0186 →
Change of Name
Mar 18, 2011
From: STEAG HAMATECH AG
To: HAMATECH AG
Reel/Frame 025983/0676 →
Assignment of Assignor's Interest
May 18, 2011
From: SINGULUS TECHNOLOGIES AG
To: HAMATECH APE & CO. KG
Reel/Frame 026302/0913 →
Change of Name
Aug 16, 2012
From: HAMATECH APE GMBH & CO. KG
To: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG.
Reel/Frame 028801/0484 →