Patent Assignment
Reel/Frame 018860/0038
Assignment of Assignor's Interest
Recorded: 2007-02-06
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Liquid Material Vaporization Apparatus for Semiconductor Processing Apparatus