Patent Assignment
Reel/Frame 018863/0028
Assignment of Assignor's Interest
Recorded: 2007-02-07
Pages: 6
Assignors
DIP, ANTHONY
Executed: 2007-01-19
GUMPHER, JOHN
Executed: 2007-01-19
LEITH, ALLEN JOHN
Executed: 2007-01-17
OH, SEUNGHO
Executed: 2007-01-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Reduced Defect Silicon or Silicon Germanium Deposition in Micro-Features