Assignment of Assignor's Interest

Recorded: 2007-02-01 Pages: 2

Assignors

FIOLKA, DAMIAN

Executed: 2006-10-20

DIECKMANN, NILS

Executed: 2006-10-23

MAUL, MANFRED

Executed: 2006-11-02

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STR. 2, OBERKOCHEN, D-73447, GERMANY

Covered Property (1)

System for Reducing the Coherence of Laser Radiation

Patent: 7,593,095 →

Application: 10/590,537 →

Publication: US 2007/0206381

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.