Patent Assignment
Reel/Frame 018879/0529
Assignment of Assignor's Interest
Recorded: 2007-02-08
Pages: 2
Assignor
ELERS, KAI-ERIK
Executed: 2006-12-15
Assignee
ASM AMERICA, INC.
3440 EAST UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Property
(1)
Plasma-Enhanced Ald of Tantalum Nitride Films
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.