Patent Assignment
Reel/Frame 018884/0023
Assignment of Assignor's Interest
Recorded: 2007-02-09
Pages: 4
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Objective for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.