Patent Assignment
Reel/Frame 018893/0699
Assignment of Assignor's Interest
Recorded: 2007-02-12
Pages: 5
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Uv Treatment for Carbon-Containing Low-K Dielectric Repair in Semiconductor Processing