Patent Assignment
Reel/Frame 018900/0566
Assignment of Assignor's Interest
Recorded: 2007-02-12
Pages: 3
Assignors
MOS, EVERHARDUS CORNELIS
Executed: 2007-01-09
VAN DER SCHAAR, MAURITS
Executed: 2007-01-09
SIMONS, HUBERTUS JOHANNES GERTRUDUS
Executed: 2007-01-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method