Patent Assignment
Reel/Frame 018906/0361
Assignment of Assignor's Interest
Recorded: 2007-02-15
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithographic Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.