Patent Assignment
Reel/Frame 018921/0315
Assignment of Assignor's Interest
Recorded: 2007-02-22
Pages: 3
Assignors
HIROTSU, SHIN
Executed: 2007-02-01
NAITO, WAKAKO
Executed: 2007-02-01
SUZUKI, YOSHINORI
Executed: 2007-02-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Etching Method and Computer Readable Storage Medium