Patent Assignment
Reel/Frame 018936/0642
Assignment of Assignor's Interest
Recorded: 2007-02-16
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501; NL-5504 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Inspection Apparatus, Lithographic System Provided with the Inspection Apparatus and a Method for Inspecting a Sample