Patent Assignment
Reel/Frame 018940/0045
Assignment of Assignor's Interest
Recorded: 2007-02-28
Pages: 2
Assignor
TAKAHASHI, HIROAKI
Executed: 2007-02-15
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Handling Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.