Patent Assignment
Reel/Frame 018945/0888
Assignment of Assignor's Interest
Recorded: 2007-02-28
Pages: 15
Assignor
ASM NUTOOL, INC.
Executed: 2006-12-04
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method and Apparatus to Deposit Layers with Uniform Properties
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.