Patent Assignment
Reel/Frame 015701/0786
Change of Name
Recorded: 2005-02-10
Pages: 4
Assignor
NUTOOL, INC.
Executed: 2004-07-29
Assignee
ASM NUTOOL, INC.
3501 W WARREN AVE, FREMONT, CALIFORNIA, 94538-6400
Covered Properties
(22)
Process to minimize and/or eliminate conductive material coating over the top surface of a patterned substrate and layer structure made thereby
Application:
09/671,800 →
Apparatus for Plating and Polishing a Semiconductor Workpiece
Method and Apparatus of Sealing Wafer Backside for Full-Face Electrochemical Plating
Advanced Chemical Mechanical Polishing System with Smart Endpoint Detection
Distributed Control System for Semiconductor Manufacturing Equipment
Device providing electrical contact to the surface of a semiconductor workpiece during metal plating and method of providing such contact
Application:
10/302,213 →
Publication:
US 2003/0070930
Integrated System for Processing Semiconductor Wafers
Method and Apparatus for Integrated Chemical Mechanical Polishing of Copper and Barrier Layers
Application:
10/387,698 →
Publication:
US 2004/0023607
Method for Reduction of Defects in Wet Processed Layers
Chemical mechanical polishing endpoint detection
Application:
10/459,322 →
Publication:
US 2003/0213558
Fluid Bearing Slide Assembly for Workpiece Polishing
Edge and bevel cleaning process and system
Application:
10/676,895 →
Publication:
US 2004/0140287
Distributed control system for semiconductor manufacturing equipment
Application:
10/697,199 →
Publication:
US 2004/0089421
Integrated Circuit Interconnect Fabrication Systems
Workpiece proximity etching method and apparatus
Application:
10/744,293 →
Publication:
US 2004/0134793
Method and Apparatus to Deposit Layers with Uniform Properties
Chemical mechanical polishing method and apparatus for controlling material removal profile
Application:
10/761,877 →
Publication:
US 2005/0159084
Process and system for providing electrochemical processing solution with reduced oxygen and gas content
Application:
10/772,687 →
Publication:
US 2004/0222100
Advanced Chemical Mechanical Polishing System with Smart Endpoint Detection
Method of reducing post-CMP defectivity
Application:
10/818,976 →
Publication:
US 2004/0259348
Electrochemical Mechanical Processing Apparatus
Method and Structure to Improve Reliability of Copper Interconnects
Related Assignments
(21)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 28, 2001
From: TALIEH, HOMAYOUN; UZOH, CYPRIAN EMEKA
To: NUTOOL, INC.
Reel/Frame 012151/0345 →
Assignment of Assignor's Interest
Jun 10, 2003
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL INC
Reel/Frame 014187/0563 →
Assignment of Assignor's Interest
Aug 1, 2003
From: TALIEH, HOMAYOUN; YOUNG, DOUGLAS W.
To: NUTOOL, INC.
Reel/Frame 014359/0188 →
Assignment of Assignor's Interest
Aug 21, 2003
From: ASHJAE, JALAL; GOVZMAN, BORIS; FREY, BERNARD M.; NAGORISKI, BOGUSLAV A.
To: NUTOOL, INC.
Reel/Frame 014430/0017 →
Assignment of Assignor's Interest
Oct 29, 2003
From: KOMANDUR, SRINIVASAN M.; ASHJAEE, JALAL
To: NUTOOL, INC
Reel/Frame 014659/0836 →
Assignment of Assignor's Interest
Nov 7, 2003
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 014689/0402 →
Assignment of Assignor's Interest
Dec 22, 2003
From: UZOH, CYPRIAN EMEKA; TALIEH, HOMAYOUN; BASOL, BULENT M.; YOUNG, DOUGLAS W.
To: NUTOOL INC.
Reel/Frame 014842/0173 →
Assignment of Assignor's Interest
Mar 1, 2004
From: KOMANDUR, SRINVASAN; ASHJAEE, JALAL
To: NUTOOL, INC.
Reel/Frame 015023/0660 →
Assignment of Assignor's Interest
Mar 3, 2004
From: BOGART, JEFFREY; VOLODARSKY, RIMMA; LINDQUIST, PAUL; BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 015041/0480 →
Assignment of Assignor's Interest
Mar 23, 2004
From: BASOL, BULENT M.; BAJAJ, RAJEEV; ASHJAE, JALAL
To: NUTOOL, INC.
Reel/Frame 015120/0416 →
Assignment of Assignor's Interest
Mar 23, 2004
From: BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 015120/0398 →
Assignment of Assignor's Interest
Apr 2, 2004
From: TALIEH, HOMAYOUN; BASOL, BULENT
To: NUTOOL, INC.
Reel/Frame 015184/0222 →
Assignment of Assignor's Interest
Apr 6, 2004
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 015186/0314 →
Assignment of Assignor's Interest
May 18, 2004
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 015339/0975 →
Assignment of Assignor's Interest
Sep 7, 2004
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: ASM NUTOOL, INC.
Reel/Frame 015758/0834 →
Change of Name
Dec 20, 2004
From: NUTOOL, INC.
To: ASM NUTOOL, INC.
Reel/Frame 015479/0376 →
Change of Name
Aug 22, 2005
From: NUTOOL, INC.
To: ASM NUTOOL, INC.
Reel/Frame 016902/0206 →
Assignment of Assignor's Interest
Feb 28, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018945/0888 →
Assignment of Assignor's Interest
Mar 2, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018963/0424 →
Assignment of Assignor's Interest
Mar 2, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018963/0409 →
Assignment of Assignor's Interest
Mar 12, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 019000/0080 →