Patent Assignment
Reel/Frame 015479/0376
Change of Name
Recorded: 2004-12-20
Pages: 4
Assignor
NUTOOL, INC.
Executed: 2004-07-29
Assignee
ASM NUTOOL, INC.
3501 W WARREN AVE, FREMONT, CALIFORNIA, 94538-6400
Covered Properties
(22)
Plating Method and Apparatus That Creates a Differential Between Additive Disposed on a Top Surface and a Cavity Surface of a Workpiece Using an Indirect External Influence
Method and Apparatus for Full Surface Electrotreating of a Wafer
Method and Structure for Thru-Mask Contact Electrodeposition
In-situ endpoint detection for non-transparent polishing member
Advanced Chemical Mechanical Polishing System with Smart Endpoint Detection
Advanced Bi-Directional Linear Polishing System and Method
Method and System for Optically Enhanced Metal Planarization
Method and Apparatus for Eliminating Defects and Improving Uniformity in Electrochemically Processed Conductive Layers
Constant Low Force Wafer Carrier for Electrochemical Mechanical Processing and Chemical Mechanical Polishing
Process and System for Eliminating Gas Bubbles During Electrochemical Processing
Process and apparatus for air bubble removal during electrochemical processing
Application:
10/692,953 →
Publication:
US 2004/0182715
Continuous bleed-and-feed process and equipment
Application:
10/698,872 →
Publication:
US 2004/0142566
Methods for depositing high yield and low defect density conductive films in damascene structures
Application:
10/698,878 →
Publication:
US 2005/0095854
Integrated Circuit Interconnect Fabrication Systems
Electrochemical mechanical processing using low temperature process environment
Application:
10/705,360 →
Publication:
US 2004/0170753
Method and Apparatus for Localized Material Removal by Electrochemical Polishing
Electrode Assembly for Electrochemical Processing of Workpiece
Method of Electroplating Copper Layers with Flat Topography
Means to Improve Center to Edge Uniformity of Electrochemical Mechanical Processing of Workpiece Surface
Method of reducing post-CMP defectivity
Application:
10/818,976 →
Publication:
US 2004/0259348
System for Electropolishing and Electrochemical Mechanical Polishing
Device Providing Electrical Contact to the Surface of a Semiconductor Workpiece During Processing
Related Assignments
(23)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 15, 2001
From: BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 012261/0029 →
Assignment of Assignor's Interest
Jul 7, 2003
From: YOUNG, DOUGLAS W.; PERLOV, VULF; VELAZQUEZ, EFRAIN
To: NUTOOL, INC.
Reel/Frame 014280/0791 →
Assignment of Assignor's Interest
Aug 11, 2003
From: BASOL, BULENT M.
To: NUTOOL, INC
Reel/Frame 014389/0895 →
Assignment of Assignor's Interest
Oct 24, 2003
From: BASOL, BULENT M.
To: NUTOOL, INC
Reel/Frame 014644/0997 →
Assignment of Assignor's Interest
Oct 27, 2003
From: WANG, YUCHUN; FREY, BERNARD M.; BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 014152/0807 →
Assignment of Assignor's Interest
Oct 31, 2003
From: UZOH, CYPRIAN E.; BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 014664/0070 →
Assignment of Assignor's Interest
Nov 7, 2003
From: BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 014689/0402 →
Assignment of Assignor's Interest
Nov 10, 2003
From: BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 014698/0090 →
Assignment of Assignor's Interest
Nov 21, 2003
From: BASOL, BULENT M.
To: NUTOOL, INC
Reel/Frame 014800/0722 →
Assignment of Assignor's Interest
Nov 24, 2003
From: WANG, YUCHUN; FREY, BERNARD M.; BASOL, BURLENT M.; TALICH, HOMAYOUN
To: NUTOOL, INC
Reel/Frame 014152/0804 →
Assignment of Assignor's Interest
Nov 26, 2003
From: BASOL, BULENT M.; UZOH, CYPRIAN E.
To: NU TOOL, INC.
Reel/Frame 014748/0297 →
Assignment of Assignor's Interest
Dec 1, 2003
From: UZOH, CYPRIAN E.; TALIEH, HOMAYOUN; BASOL, BULENT M.; YAKUPOGLU, HALIT N.
To: NUTOOL, INC
Reel/Frame 014766/0015 →
Assignment of Assignor's Interest
Jan 26, 2004
From: BASOL, BULENT M.; ASHJAEE, JALAL; VOLODARSKY, KONSTANTIN
To: NUTOOL, INC.
Reel/Frame 014938/0611 →
Assignment of Assignor's Interest
Mar 11, 2004
From: BORGART, JEFFREY; WANG, HUNG-MING; ERDEMLI, SERKAN; AKSU, SERDAR
To: NUTOOL INC.
Reel/Frame 015067/0529 →
Assignment of Assignor's Interest
Apr 2, 2004
From: FREY, BERNARD; GROSS, STEVEN; BASOL, BULENT M.; TALIEH, HOMAYOUN
To: NUTOOL, INC.
Reel/Frame 015179/0386 →
Assignment of Assignor's Interest
Aug 25, 2004
From: UZOH, CYPRIAN E.; AKSU, SERDAR; BASOL, BULENT M.
To: NUTOOL, INC.
Reel/Frame 015084/0140 →
Change of Name
Feb 10, 2005
From: NUTOOL, INC.
To: ASM NUTOOL, INC.
Reel/Frame 015701/0786 →
Change of Name
Feb 11, 2005
From: NUTOOL, INC.
To: ASM NUTOOL, INC.
Reel/Frame 015708/0731 →
Assignment of Assignor's Interest
Feb 12, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018893/0598 →
Assignment of Assignor's Interest
Feb 12, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018893/0580 →
Assignment of Assignor's Interest
Mar 2, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018963/0424 →
Assignment of Assignor's Interest
Mar 2, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 018963/0409 →
Assignment of Assignor's Interest
Mar 12, 2007
From: ASM NUTOOL, INC.
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 019000/0080 →