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App. No. 10/197,090 · Confirmation No. 7694

ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2008-12-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-12-01 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2007-07-26 COCIN Request for Certificate of Correction 2 View
2007-07-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-12-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-02-19 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-04-17 TRNA Transmittal of New Application 2 View
2003-04-17 DRW Drawings-only black and white line drawings 10 View
2002-07-15 TRNA Transmittal of New Application 2 View
2002-07-15 SPEC Specification 19 View
2002-07-15 CLM Claims 3 View
2002-07-15 ABST Abstract 1 View
2002-07-15 DRW Drawings-only black and white line drawings 12 View
2002-07-15 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/197,090
Filed
2002-07-15
Granted
2004-04-20
Pub. No.
US20030153245A1
Art Unit
3723
PTA
-4 days