Granted Patent
Utility
US 6,736,929
· Confirmation No. 1982
DISTRIBUTED CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-12-15 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-12-01 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2005-12-08 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-03-01 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-02-24 | XRUSH |
Internal Response to Printer Query from Technology Center(TC) | 1 | View | |
| 2004-02-24 | CLM |
Claims | 1 | View | |
| 2003-12-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-12-11 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 5 | View | |
| 2003-12-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-12-11 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-12-11 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-11-21 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2002-07-19 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-19 | SPEC |
Specification | 7 | View | |
| 2002-07-19 | CLM |
Claims | 2 | View | |
| 2002-07-19 | ABST |
Abstract | 1 | View | |
| 2002-07-19 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-07-19 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-07-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-19 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Srinivasan M. Komandur
San Jose, CA
Jalal Ashjaee
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
156/345.24
G05B19/41865
Y02P90/02
H10P72/0472
H10P72/3304
H10P72/0406
H10P72/0454
H10P72/0612
G05B2219/32272
G05B2219/45031
Prosecution
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- Customer No.
- 83537
- Docket No.
- NT-257-US
- Confirmation No.
- 1982
Publication
- Pub. No.
- US20030155073A1
- Pub. Date
- 2003-08-21
Patent Term Adjustment
0days
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Quick Facts
- Patent No.
- US 6,736,929
- App. No.
- 10/199,924
- Filed
- 2002-07-19
- Granted
- 2004-05-18
- Pub. No.
- US20030155073A1
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- PTA
- 0 days
External Links