Patent Application
Provisional
App. No. 60/357,148
· Confirmation No. 8691
Integrated system for processing semiconductor wafers
Provisional Application Expired
Inventors
Jalal Ashjaee
Cupertino, CA
Bernard Frey
Berkeley, CA
Boguslav A. Nagorski
San Jose, CA
Douglas W. Young
Sunnyvale, CA
Homayoun Talieh
San Jose, CA
Bulent M. Basol
Manhattan Beach, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 042496/0293212 NT-228(P)
- Confirmation No.
- 8691
Child
Claims priority from a provisional application
→
App. 10/369,118
· US 7,059,944
Filed 2003-02-18
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/697,199
Filed 2003-10-31
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 11/452,609
Filed 2006-06-13
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/199,924
· US 6,736,929
Filed 2002-07-19
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/357,148
- Filed
- 2002-02-15
External Links