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App. No. 10/387,698 · Confirmation No. 7422

METHOD AND APPARATUS FOR INTEGRATED CHEMICAL MECHANICAL POLISHING OF COPPER AND BARRIER LAYERS

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2006-08-18 ABN Abandonment 2 View
2006-04-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2006-04-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2006-04-14 1449 List of References cited by applicant and considered by examiner 1 View
2006-04-14 WFEE Fee Worksheet (SB06) 1 View
2006-04-14 BIB Bibliographic Data Sheet 2 View
2006-04-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2006-04-14 FWCLM Index of Claims 1 View
2006-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2006-04-11 SRNT Examiner's search strategy and results 1 View
2006-02-06 RCEX Request for Continued Examination (RCE) 2 View
2006-02-06 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-02-06 FOR Foreign Reference 12 View
2006-02-06 DRW Drawings-only black and white line drawings 10 View
2005-12-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2005-12-21 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2005-12-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2005-12-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-12-21 FWCLM Index of Claims 1 View
2005-12-21 BIB Bibliographic Data Sheet 2 View
2005-12-16 SRNT Examiner's search strategy and results 2 View
2005-12-09 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-11-14 WFEE Fee Worksheet (SB06) 1 View
2005-10-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2005-10-24 CLM Claims 3 View
2005-10-24 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-10-24 WFEE Fee Worksheet (SB06) 1 View
2005-06-21 CTNF Non-Final Rejection 6 View
2005-06-21 892 List of references cited by examiner 1 View
2005-06-21 FWCLM Index of Claims 1 View
2005-06-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-15 SRNT Examiner's search strategy and results 1 View
2005-05-06 RCEX Request for Continued Examination (RCE) 3 View
2005-05-06 CLM Claims 4 View
2005-05-06 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2005-05-06 136A Authorization for Extension of Time all replies 3 View
2005-05-06 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-05-06 WFEE Fee Worksheet (SB06) 1 View
2005-01-27 BIB Bibliographic Data Sheet 1 View
2005-01-24 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2005-01-04 CTFR Final Rejection 7 View
2005-01-04 SRFW Search information including classification, databases and other search related notes 1 View
2005-01-04 FWCLM Index of Claims 1 View
2004-12-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-13 CLM Claims 4 View
2004-12-13 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-12-13 LET. Miscellaneous Incoming Letter 2 View
2004-12-13 WFEE Fee Worksheet (SB06) 1 View
2004-10-12 PA.. Power of Attorney 6 View
2004-08-11 CTNF Non-Final Rejection 7 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-11 892 List of references cited by examiner 3 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-11 FWCLM Index of Claims 1 View
2004-08-06 SRNT Examiner's search strategy and results 4 View
2004-07-15 WFEE Fee Worksheet (SB06) 1 View
2004-06-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-14 CLM Claims 3 View
2004-06-14 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-05-20 CTRS Requirement for Restriction/Election 7 View
2004-05-20 FWCLM Index of Claims 1 View
2003-10-24 LET. Miscellaneous Incoming Letter 1 View
2003-06-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-24 DRW Drawings-only black and white line drawings 10 View
2003-06-13 PEFN Pre-Exam Formalities Notice 2 View
2003-03-13 TRNA Transmittal of New Application 2 View
2003-03-13 SPEC Specification 24 View
2003-03-13 CLM Claims 6 View
2003-03-13 ABST Abstract 1 View
2003-03-13 DRW Drawings-only black and white line drawings 11 View
2003-03-13 OATH Oath or Declaration filed 3 View
2003-03-13 WFEE Fee Worksheet (SB06) 1 View
2003-03-13 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/387,698
Filed
2003-03-13
Pub. No.
US20040023607A1
Art Unit
3723