Patent Application
Provisional
App. No. 60/417,544
· Confirmation No. 1654
Advanced chemical mechanical polishing system with smart endpoint detection
Provisional Application Expired
Inventors
Yuchun Wang
San Jose, CA
Tuan Truong
San Jose, CA
Mukesh Desai
Scottsdale, AZ
Homayoun Talieh
San Jose, CA
Bulen Basol
Manhattan Beach, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- NT-278-P2
- Confirmation No.
- 1654
Child
Claims priority from a provisional application
→
App. 10/387,698
Filed 2003-03-13
· Abandoned -- Failure to Pay Issue Fee
Child
Claims priority from a provisional application
→
App. 10/346,425
· US 6,857,947
Filed 2003-01-17
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/001704
Filed 2003-01-17
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 10/321,150
· US 6,942,546
Filed 2002-12-17
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/417,544
- Filed
- 2002-10-10
External Links