Patent Assignment
Reel/Frame 018947/0527
Assignment of Assignor's Interest
Recorded: 2007-02-16
Pages: 7
Assignors
PUYT, MICHIEL
Executed: 2007-02-01
BLEEKER, ARNO JAN
Executed: 2007-02-01
FRANSEEN, JOHANNES HENDRIKUS GERTRUDIS
Executed: 2007-02-01
COMPEN, RENE THEODORUS PETRUS
Executed: 2007-02-01
VAN DE VEN, JOHANNES THEODORUS GUILLIEMUS MARIA
Executed: 2007-02-01
STAM, EGBERT DIRK
Executed: 2007-01-31
FISCHER, RUDOLF HARTMUT
Executed: 2007-01-31
GELINCK, EDWIN ROBERT MARTIN
Executed: 2007-01-30
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus, Substrate Table, and Method for Enhancing Substrate Release Properties