Patent Assignment
Reel/Frame 018950/0771
Assignment of Assignor's Interest
Recorded: 2007-03-02
Pages: 5
Assignors
SRINIVASAN, SUNIL
Executed: 2007-02-16
JOHNSON, DAVID
Executed: 2007-02-16
WESTERMAN, RUSSELL
Executed: 2007-02-16
Assignee
OERLIKON USA, INC.
10050 16TH STREET NORTH, ST. PETERSBURG, FLORIDA, 33716
Covered Property
(1)
Notch-Free Etching of High Aspect SOI Structures Using A Time Division Multiplex Process and RF Bias Modulation
Application:
11/681,004 →
Publication:
US 2007/0175856
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.