Patent Assignment
Reel/Frame 018952/0275
Assignment of Assignor's Interest
Recorded: 2007-02-12
Pages: 4
Assignors
KOEHLER, JESS
Executed: 2006-07-03
WANGLER, JOHANNES
Executed: 2006-07-05
BROTSACK, MARKUS
Executed: 2006-07-06
SINGER, WOLFGANG
Executed: 2006-06-20
FIOLKA, DAMIAN
Executed: 2006-07-13
MAUL, MANFRED
Executed: 2006-07-13
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System for a Microlithography Projection Exposure Installation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.