Patent Assignment
Reel/Frame 018958/0844
Assignment of Assignor's Interest
Recorded: 2007-03-05
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and System for Uniformity Control in Ballistic Electron Beam Enhanced Plasma Processing System