Patent Assignment
Reel/Frame 018966/0792
Assignment of Assignor's Interest
Recorded: 2007-03-06
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Examining Substrate Processing Conditions, and Storage Medium