Patent Assignment
Reel/Frame 018976/0098
Assignment of Assignor's Interest
Recorded: 2007-03-07
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Surface Processing Apparatus, Substrate Surface Inspecting Apparatus, Substrate Surface Inspecting Method, and Storage Medium Storing Program for Implementing the Method