Patent Assignment
Reel/Frame 018983/0414
Assignment of Assignor's Interest
Recorded: 2007-03-07
Pages: 3
Assignors
RAHTU, ANTTI
Executed: 2007-01-23
TOIS, EVA
Executed: 2007-02-15
ELERS, KAI-ERIK
Executed: 2007-02-15
LI, WEI-MIN
Executed: 2007-01-29
Assignee
ASM INTERNATIONAL N.V.
JAN VAN EYCKLAAN 10, BILTHOVEN 3723 BC, THE, NETHERLANDS
Covered Property
(1)
Enhanced thin film deposition