Patent Assignment
Reel/Frame 018986/0004
Assignment of Assignor's Interest
Recorded: 2007-02-21
Pages: 11
Assignors
WIERINGA, FOKKO PIETER
Executed: 2006-12-06
KOSTER, NORBERTUS BENEDICTUS
Executed: 2006-12-06
VAN VLIET, ROLAND EDWARD
Executed: 2006-12-06
SHARILOO, NADYEH (LEGAL REPRESENTATIVE OR HEIR OF THE ESTATE OF MARCO WEDOWSKI)
Executed: 2006-11-24
STEIN, THOMAS
Executed: 2007-01-28
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional body
Application:
11/522,783 →
Publication:
US 2007/0143032
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.