IP Library Assignment 018986/0004
Patent Assignment
Reel/Frame 018986/0004

Assignment of Assignor's Interest

Recorded: 2007-02-21 Pages: 11
Assignors
WIERINGA, FOKKO PIETER
Executed: 2006-12-06
KOSTER, NORBERTUS BENEDICTUS
Executed: 2006-12-06
VAN VLIET, ROLAND EDWARD
Executed: 2006-12-06
STEIN, THOMAS
Executed: 2007-01-28
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property (1)
Apparatus for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional body
Application: 11/522,783 →
Publication: US 2007/0143032
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →