Patent Assignment
Reel/Frame 018988/0295
Assignment of Assignor's Interest
Recorded: 2007-03-09
Pages: 3
Assignor
TANAKA, HIDEKI
Executed: 2007-02-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Prediction Method and Apparatus for Substrate Processing Apparatus