Patent Assignment
Reel/Frame 018991/0833
Assignment of Assignor's Interest
Recorded: 2007-03-08
Pages: 3
Assignors
WIHL, MARK J.
Executed: 2007-01-12
XIONG, YALIN
Executed: 2007-01-12
YIIN, LIH-HUAH
Executed: 2007-01-12
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method for Detecting Lithographically Significant Defects on Reticles
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.